Urea Analyzer providing continuous and accurate urea measurements in UPW
Urea online process control

UREA Analyzer

Urea is a critical contaminant in Ultrapure water (UPW) for semiconductor manufacturing because it contributes to total organic carbon (TOC) concentration and can adversely affect photolithography processes.

Ovivo’s UREA analyzer, a newly innovated product, provides continuous and accurate urea measurements with four sampling channels.

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The UREA Analyzer allows continuous monitoring, which is capable of capturing seasonal urea variations and adapting the UPW treatment process steps to maximize its removal.

The application is for UPW or deionized water. Other applications depend on the water composition.

Ovivo has experience with efficient urea treatment systems which can be designed regarding specific case and needs of a customer.

The UREA Analyzer has the following important features:

  • Automatic sampling and analysis
  • Continuous (24/7) operation
  • Low consumption of chemicals
  • Wide range of urea concentration
  • Grab sample options
  • Automatic software operation after initial start as well as automatic integration and interpretation
 UREA Analyzer installed in a semiconductor manufacture's UPW treatment system

Process LC-OND Analyzer for Urea monitoring

The working principle of UREA Analyzer is based on a chromatographic separation, namely LC-OND (Liquid Chromatography – Organic Nitrogen Detection).

The mobile phase (salt buffer) is pre-cleaned by a specially designed oxidation reactor. A defined volume of aqueous sample is picked up by a loop and injected into the continuous stream of the mobile phase. The sample is then fed to a pump and a chromatographic column where urea is separated from other N-species, like nitrate and ammonium.

Diagram showing uera detection in sample

After leaving the chromatographic column, the solution is fed to a short-wave UV-oxidation lamp reactor where urea is converted to nitrate.

Nitrate is then selectively detected by a low-wave UV absorption detector (UVD).

All species elute according to their specific retention times. Retention time is used for identification, while peak area units are used for quantification.

Limit of detection 1.5 ppb urea
Quantification range 3 ppb…150 ppb as urea
Sampling channels 4
Average measurement time 60 min / sample
Volume per sample < 100 mL
Max. sample pressure 10 bar (145 psi)
Voltage 90-230 V / 10 A @ 50-60 Hz
Power consumption 450 Watt
Dimensions 60 x 60 x 190 cm (24 x 24 x 75 in)
Operation mode Automatic/selectable sequence or manual single measurements
Online or grab sample analysis