The fabrication of semiconductor devices requires large volumes of ultrapure water and generates large volumes of wastewater. A reliable Semiconductor Water Recycle/Reclaim system is necessary to protect the environment and to safeguard the resources needed for the growth of the industry.

The low TOC rinse waters (second and final rinses, and organic‐free rinses) account for approximately 40% of the total UPW consumption in an average semiconductor fabrication facility. Depending on their conductivity, systems with or without ion‐exchange stages are used.

Rinse water containing organics is generated from several cleaning processes and organic baths. This high TOC rinse water can be recovered for recycle or reuse by Ovivo’s organic removal systems. These specialized plants consist of advanced monitoring and control devices, followed by activated carbon filters and various organic removal steps. The entire process is specifically designed to the type and concentration of the various organic compounds.