Semiconductor Water Recycle/Reclaim

Fab shops require large volumes of ultrapure water (UPW) and use chemicals during the fabrication of semiconductor devices, generating large volumes of wastewater, which must be reclaimed. Specially designed reclaim systems help reducing the effluent waste discharge, as well as minimizing the raw water needed for the production of UPW while protecting the environment. Ovivo technology is instrumental for providing reuse & reclaims water treatment systems essential to semiconductor fabrication

Semiconductor Water Recycle/Reclaim

The fabrication of semiconductor devices requires large volumes of ultrapure water and generates large volumes of wastewater. A reliable Semiconductor Water Recycle/Reclaim system is necessary to protect the environment and to safeguard the resources needed for the growth of the industry.

The low TOC rinse waters (second and final rinses, and organic‐free rinses) account for approximately 40% of the total UPW consumption in an average semiconductor fabrication facility. Depending on their conductivity, systems with or without ion‐exchange stages are used.

Rinse water containing organics is generated from several cleaning processes and organic baths. This high TOC rinse water can be recovered for recycle or reuse by Ovivo’s organic removal systems. These specialized plants consist of advanced monitoring and control devices, followed by activated carbon filters and various organic removal steps. The entire process is specifically designed to the type and concentration of the various organic compounds.


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Numerous references, combined with our impressive list of installed facilities guarantees excellence and reliability supported by experienced employees.

Ovivo’s solutions for the reclaim of semiconductor wastewater, means:

  • More than 40 active wastewater treatment systems worldwide
  • Worldwide 5’000 m per hour of Semiconductor wastewater reclaimed
  • Long-term, repeated customers in Asia, Europe and the US

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