OvivUP™ – M010 Mixed Bed Ion Exchange Resin

OvivUP™ - M010 Mixed Bed Ion Exchange Resin is specially conditioned and rinsed for producing Semiconductor grade UPW with the highest quality standards (resistivity ≥18.2 MΩ•cm and TOC <1 ppb). Ovivo resins are characterized by very low Boron, metals and TOC leaks as well as very small rinse water volumes. This is achieved by using very high grade UP water (following the ITRS guidelines) for the cleaning and rinsing of the UP grade resins during the manufacturing process. A special care is given to critical parameters such as TOC, silica and boron, particles and metals.

OvivUP™ – M010 Mixed Bed Ion Exchange Resins offer the following benefits which results in significant quality improvement:

  • controlled production process
  • specific cleaning procedures
  • specific conditioning procedures
  • gas barrier packaging

 

OvivUP™ – M010 Mixed Bed Ion Exchange Resin are specifically produced and pre-conditioned for improved performance on critical parameters such as:

  • very low TOC release (< 1 ppb TOC)
  • low release of Silica (<50 ppt) & Boron (<10 ppt)
  • very low metal content (< 1 ppm, dry resin)
  • very low metal release (< 0.1 – 0.2 ppt)
  • very low TMA release (< 5 ppt)

 

OvivUP™ – M010 Mixed Bed Ion Exchange Resin – TOC Rinse Down Curve

OVIVUP™ – M010

OVIVUP™ – M010

OvivUP™ – M010 / Technical Description

 

Description Unit OvivUP-C010 OvivUP-A010
Ion Exchange Capacity eq/l
kgr/ft3
≥1.7
≥37
≥0.9
≥19.5
Ionic Form eq% ≥99.9H+ ≥90% OH
Water Content  % 50-60 62-72
Bulk Density g/l
lb/ft3
~690 – 700
~43.0-43-7
Physical Form Dark Amber Beads Light yellow beads, translucent
Beads Structure Gel
Matrix  Cross-linked polystyrene
Functional Group Sulfonic Acid  Quaternary Ammonium/Type 1
Effective Size mm/inch 0.45/0.0177
Outlet Resistivity* as:
Single Bed MΩ•cm ≥ 12 (after 15 BV) ≥ 15 (after 15 BV)
Mixed Bed MΩ•cm ≥ 18 (after 100 BV)
ΔTOC* as:
Single Bed ppb ≤ 6 (after 100 BV) ≤ 3 (after 100 BV)
Mixed Bed ppb ≤ 1.5 (after 100 BV)
Metals Content* ppb/g dry resin Available on request. Typical values: < 2000

 

 

OvivUP™ – M010 / Operation Conditions

Maximum Operating Temperature °C
°F
60
140
Service Flow Rates BV/h
gpm/ft2
10 – 80
4.1 – 32.8
Minimum Bed Depth mm
inch
800
32
Maximum Pressure Drop bar
psig
1.5
21

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